Design and Fabrication of Compact MEMS Electromagnetic Micro-Actuator with Planar Micro-Coil Based on PCB

Micro Contacts and Micro Manipulation with Mems Actuator Arrays

As improvements in fabrication technology for MEMS (micro electro mechanical systems) increase the availability and diversity of these micromachines, engineers are deening a growing number of tasks to which they can be put. The idea of carrying out tasks using coordinated systems of MEMS units motivates the development of automated, algorithmic methods for modeling, designing and controlling th...

MEMS-Based Micro Gas Chromatography: Design, Fabrication and Characterization

Demonstration of a Micro-cpl Based on Mems Fabrication Technologies

Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator...

Design and Dynamic Modeling of Planar Parallel Micro-Positioning Platform Mechanism with Flexible Links Based on Euler Bernoulli Beam Theory

This paper presents the dynamic modeling and design of micro motion compliant parallel mechanism with flexible intermediate links and rigid moving platform. Modeling of mechanism is described with closed kinematic loops and the dynamic equations are derived using Lagrange multipliers and Kane’s methods. Euler-Bernoulli beam theory is considered for modeling the intermediate flexible link. Based...

Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon strips. The output power of the generator depends on the temperature difference between the hot a...